Products

Handling | Wetprocess | CMP | Photolitho | Diffusion | Replacements | Solar | All products

Handling

Group	Category	Description
Manual Handling (45)	Coil Cords (11) Flat Finders (7) Freedom Wands (5) Notch Finders (2) Vacuum Wands (16) Wafer Gripper (4)	Products for Manual Handling of Substrates or Wafers.
Automatic Handling (33)	Automatic Flat Finders (9) Automatic Notch Finders (5) Automatic Transfer Systems (10) Carrier Loading Systems (3) Inspection Systems (6)	Automatic Substrate Handling Products or Small Systems, including Wafer Inspection Systems
Cassettes (18)	Aluminium Cassettes (14) Process Boats (4)	Selection of Carriers and Process Boats in Aluminum and various plastics.
Shipping / Storage (15)	Shipping Boxes (7) Single Wafer Shippers (2) Wafer Canisters (4) Wafer Jars (2)	Variety of plastic boxes, shippers and canisters for Shipping and Storage of Wafers.
Grinding / Dicing (21)	Flex Frames (2) Grinding Dicing Tape (9) Hoop Rings (2) Tape Applicators (5) UV Curing Systems (3)	Products for Grinding or Dicing of Wafers.
Wafers (11)	Mock Wafers (1) Wafers (10)	Variety of base Wafers in various Materials and Sizes.

Wetprocess

Group	Category	Description
Cassettes (3)	Process Boats (3)	Selection of Carriers and Process Boats in Aluminum and various plastics.
Fittings / Tubing (31)	PFA Fittings (31)	PFA Fittings and PFA Tubing.
Chemical Pumps (8)	Bellows Pumps (8)	Pumps for ultra-pure Chemicals
Fluid Heating (8)	DI Water Heaters (2) Heat Exchangers (1) Immersion Heaters (2) In-Line Fluid Heaters (2) Quartz Infrared In-Line Heater (1)	Products for Ultra Pure Fluid Heating
Processing (19)	Megasonic Cleaning (4) Process Baths, PTFE, PVDF, PP (7) Processing: Holder, Single Wfr (8)	Variety of Process Baths or Tanks, including Heated Quartz Baths for batch wafers or single substrate process holders.
Spin Processor (8)	Single Wafer Spin Processor (8)	Single Wafer Spin Processors
Flow & Pressure Control (26)	Flow Sensors (12) Flow Switches (3) Pressure Sensors (2) Quick Connectors (9)	Products for Fluid Flow and Pressure Control
Valves & Sprayguns (10)	Air Cylinders (1) Check Valves (1) Plug Valves (1) Sprayguns (5) Valves (2)	Plastic Valves and Nitrogen Spray Guns

CMP

Group	Category	Description
Retaining Rings (6)	Retaining Rings (6)	Retaining Rings for CMP Process
Refurbishment (1)	NSK Motor Refurbishment (1)	Refurbishment for CMP area
Chemical Pumps (1)	CMP Slurry Pumps (1)	CMP Slurry Pumps
Slurry Flow Control (6)	Slurry Flow Meters (6)	Slurry Flow Control Products

Photolitho

Group	Category	Description
Coating (6)	Single Wafer Spin Coaters (6)	Photo Resist Coating Applications
Reticle Storage (3)	Reticle Storage Boxes (1) Reticle Storage Cabinets (2)	Reticle Storage Cabinets and Mask Storage Boxes
Reticle Handling (13)	Reticle Handling Tools (13)	Mechanical Handling Tools for Masks or other Glass Substrates
UV Exposure (19)	Flat Exposure (1) UV Exposure Meters (14) UV Lightsources (4)	Products and Measurement Systems for UV Exposure
Aligners (9)	Mask Aligners (8) Nano Imprint (1)	Mask Aligners, including Nano Imprint Modules
Resistivity Meters (5)	Resistivity Meters (5)	Surface Resistivity Meters

Diffusion

Group	Category	Description
Diffusion Furnace Parts (9)	Heating Elements (3) Insulation Collars / Discs (4) Vestibule Blocks (2)	Second Source Parts for Diffusion Ofens
Gas (22)	Gas Filters (22)	Parts for Gas Applications

Replacements

Group	Category	Description
Replacements Parts (22)	End Effectors (22)

Solar

Group	Category	Description
Manual Handling (2)	Wafer Gripper (2)	Products for Manual Handling of Substrates or Wafers.
Cassettes (3)	Process Boats (3)	Selection of Carriers and Process Boats in Aluminum and various plastics.
Diffusion Furnace Parts (1)	Heating Elements (1)	Second Source Parts for Diffusion Ofens
Solar Fluid Applications (4)	Fluid Heating (4)	In-Line heaters for Fluid Heating.