List

WIS Wafer Inspection System:
The wafer inspection system is designed for optical inspection of wafers. A carrier containing wafers is positioned on the system, and the desired wafer will be elevated from the carrier in a vertical direction. The wafer is supported on a specially designed edge-grip with a low contact area. Once elevated, the wafer can be rotated to any direction and angle for optical inspection. When the inspection of the wafer is finished, the wafer is lowered back into the carrier and the next programmed wafer will be presented.

The system is designed for "drop-in" to a work surface. The steel casing will be below the table surface so the cassette is at table-top level for ergonomic handling.

- Optical inspection for wafers
- Suitable for 5", 6", 8" wafers (WIS5, WIS6 or WIS8)
- Two programmable viewing angles
- Programmable wafer selection:
. all slots
. even slots
. odd slots
. user-defined slots
- Up to 10 slot programs can be stored
- Wafer automatically returns to carrier after inspection - independent of viewing angle
- After positioning to pre-programmed viewing angle, the operator can rotate the wafer in either direction
- Typical process time for 25 wafers: 2 minutes
- Small footprint table top unit
- Adapter allows interchangeable carriers
- Optional RS232- Interface for host communication
- Separate keyboard with LCD for operator control
- Ergonomic user-friendly interface
- Components in contact with wafer are PEEK material
- ESD-safe
- CE-conformity
- Size (LxDxH): 400 mm x 240 mm x 440 mm, 15.8” x 9.5” x 17.5”
- Weight: approx. 15 kg / 33lbs
- Power supply: 100 - 240VAC, 50 / 60 Hz, 250 W

Each unit can be configured to your wafersize and process cassette: please specify at request. Thin Wafer configurations are available.

Options:
- High Speed
- Table to build in the WIS with space for one or two more carriers. Size: 750 x 750 x 750mm (DxWxH)
- Face-to-Face programming
- External Start-Stop Function