List

Compact design inline primary flow sensor and externally mounted controller unit. The flow sensor is a straight-through flowtube that uses ultrasonic sensing technology to measure the flow rate. The Controller Electronics receives the raw flowrate signal from the sensor and provides flowrate information in terms of analog and pulse output signals. (Both the LCD display and output signals are user-scalable.)

Flow Range 1-4000 ml/min.
Accuracy ±2% of reading (for 20-100% of flow range, ±5% of reading for 0-20% of flow range.)
Repeatability: ±0.5%
Fluid Temperature Range: 10-60°C

Sensors/Transducers sit outside tube - hence completely non-invasive. No pressure drops, no moving parts. Fast responsive time (0.1 sec) ideal for CMP process measurements where flow fluctuations are high due to use of peristaltic pumps.