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SPS icon red  Wetprocess | Groups | Categories | List | MCD200-NPP: Spinprocessor Manual Dispense 200mm

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Part number:MCD200-NPP
Manufacturer & Category:APT | Single Wafer Spin Processor Spin Processor
Product & Model:Spinprocessor Manual Dispense 200mm
  
Specification:

POLOS Single Substrate Spin Processor suitable for cleaning, rinsing, coating and all manual chemical dispense applications for wafers or substrates up to Ø200mm (8“) or 178mm (7“) Square.

Units also available for up to 300mm, or in PTFE or as OEM In-Deck version with remote keyboard.
(more info: www.spincoating.com)

FEATURES MCD200-NPP Single Substrate Spin Processor:

  • Manual or optional Semi-Automatic Chemical Dispense
  • Clear/Transparant Flat Top Lid, with Center Hole
  • Seamless Full-Plastic Housing in Natural Polypropylene (NPP)
  • Table-Top Model: dimensions: 33 (w) x 55 (d) x 32 (h) cm
  • Substrate size: fragments and substrates up to Ø260mm (or 8”) or 6"x6"
  • Servo-controlled Motor, assuring repeatable rpm rates
  • Easy, step-by-step Programming via Gloved-Finger-Friendly, Full-Size Keyboard with LED Backlit Display 
  • Programmable Digital Process Controller:
    • Storage of multiple programs of 99 Step Recipes each, for:
      • Speed 1-10.000rpm, Time, Acceleration
      • Vacuum On/Off 
      • Relay Open/Close
      • Multi-User Access Levels
  • 2 Programmable ON/OFF Switching Outputs
    e.g. for Dispense On/Off, Nitrogen On/Off, etc.
  • Drain connection
  • CE-approved

Unit comes including standard Vacuum Chuck A-V36-S45-PP and Small Fragment Adapter D-V10-S50-PP up to Ø150mm, or alternatively, Vacuum Chuck A-V87-S96-PP for larger substrates up to Ø200mm with (1) centering aid (F-Sx/POLOS200).

       or 
Adapter D-V10-S50-PP,                           A-V87-S96-PP
easily fits on top of A-V36-S45-PP

A wide variety of other chucks, including non-vacuum, are available at request.

The POLOS MCD200 Spin Processors are available in NPP or PTFE, as Table-Top or OEM In-Deck unit.

OPTIONS

  • OEM In-Deck Version (IND)
  • PTFE Housing instead of Natural Polypro
  • Drain Exhauxt Hose (DEXT-NPP)
  • Vacuum Pump (VP80)
  • Wafer Centering Aid (F-Sx/POLOS200)
  • Syringe Starter Kit (SHSK)
  • Semi-Automatic Dispense System (DS-PER-V or DS-PER-VI for watery fluids)
  • N2 Diffuser Syringe Holder, mountable on lid (N2DSH)

TYPICAL APPLICATIONS:

  
Image:Shop: Wetprocess
Part number: MCD200-NPP
Product: Spinprocessor Manual Dispense
Model: 200mm
Category: Single Wafer Spin Processor