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Wafer Holder for LIGA LIGA 84/54, PMMA Frame, with PMMA Lid
Wetprocess » Processing » Processing: Holder, Single Wfr » SILICET » List » SIL-IIL8454B1C1
Wetprocess » Processing » Processing: Holder, Single Wfr » SILICET » List » SIL-IIL8454B1C1
Our patented vaccum holder LIGA with easy exchangeable seals is a new generation of holding device, created for electroplating processes. The substrate is held securely by means of a vacuum, thus also protecting it reliably from the electrolyte.
The vacuum holder LIGA is equipped with an additional seal, which protects the entire substrate front including the edge from the electrolyte. Substrate contact is made by means of a silver-plate on the backside. The protected area behind the substrate is ventilated to provide pressure compensation.
Equipment:
Seals: EPDM peroxide cured and sulfure-free
Supply Line: 3 Norprene-connecting tubes
Rack: PMMA or PTFE-modified
Cover: Glass / PMMA
