| Specification: | POLOS Single Substrate Spin Processor / Spincoater with Automatic Chemical Dispense, suitable for cleaning, rinsing, coating and all manual chemical dispense applications for wafers or substrates up to Ø200mm (8“) or 178mm (7“) Square.
Units are also available for up to 300mm, in PTFE or as OEM In-Deck version with remote keyboard.
(more info: www.spincoating.com)
FEATURES ACD200-NPP Single Substrate Spin Processor:
- Automatic Chemical Dispense:
- dispensing fluids through up to 6 spray nozzles
- each programmable for sequential or parallel dispense
- Clear/Transparant Domed Lid with central integrated N2 shower purge
- Seamless Full-Plastic Housing in Natural Polypropylene (NPP)
- Table-Top Model: dimensions: 33 (w) x 55 (d) x 32 (h) cm
- Substrate size: fragments and substrates up to Ø260mm (or 8") or 6"x6"
- Servo-controlled Motor, assuring repeatable rpm rates
- Easy, step-by-step Programming via Gloved-Finger-Friendly, Full-Size Keyboard with LED Backlit Display
- Programmable Digital Process Controller:
- Storage of multiple programs of 99 Step Recipes each, for:
- Speed 1-10.000rpm, Time, Acceleration
- Vacuum On/Off
- Relay Open/Close
- Multi-User Access Levels
- 2 Programmable ON/OFF Switching Outputs
e.g. for Dispense On/Off, Nitrogen On/Off, etc.
- Drain connection
- CE-approved
Unit comes standard including 2 integrated spray nozzles and central N2 shower purge.
Vacuum Chuck A-V36-S45-PP and Small Fragment Adapter D-V10-S50-PP up to Ø150mm, or alternatively, Vacuum Chuck A-V87-S96-PP for larger substrates up to Ø200mm and (1) centering aid (F-Sx/POLOS200) are also included.
  or 
Adapter D-V10-S50-PP, A-V87-S96-PP
easily fits on top of A-V36-S45-PP
A wide variety of other chucks, including non-vacuum, are available at request.
The POLOS ACD200 Spin Processors are available in NPP or PTFE, as Table-Top or OEM In-Deck unit.
OPTIONS
- OEM In-Deck Version (ID)
- PTFE Housing instead of Natural Polypro
- Heavy Duty Motor for Puddle Function (HD)
- Wafer Centering Tool (F-Sx/POLOS200)
- Drain Exhaust Hose (DEXT)
- Drain Exhauxt Seperation Port Tee (DET)
- Vacuum Pump (VP80)
- Dispense Vessel in PTFE (DV)
- Adjustable Injector Head (ILACD)
- Back-Side Rinse (BSR)
- Edge Bead Removal (EBR)
- Mini Wet Station (MWS)
TYPICAL APPLICATIONS:
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