List

The Flat Exposer exposes 25 wafers in one batch. It cures the unfavourable photoresist on the flat of 5 & 6 inch wafers to avoid particle problems.

The LED light sources are mounted on easy replaceable PCB's.

Exposure Time: 180 sec till 300 sec. depending on sensitivity of the photoresist and can be programmed by the user.

The Flat Exposer is designed as a compact standalone tool.

Operation:
The light source is produced by a light diode, which is solded on to a printed board. This printed board consists of eight units. The exposure time can be moved from 20 up to 200 seconds, which had been tested in an experiment.

The Flat Exposer consists of two seperate Exposer units, therefore a secured working process is guarenteed. If a failure happens, or if the diodes have to be changed you con continue the production on the second exposer unit. The two Flat Exposers are built in a compact design with electrical wires and a controlling system. The hurdle is centered over the light source.

Pos. 1 signal light
Pos. 2 hurdle ledger
Pos. 3 hurdle plate
Pos. 4 pick up unit
Pos. 5 optode
Pos. 6 key operater switch
Pos. 7 operation control panel
Pos. 8 tracer