Handling | Processing | Processing: Holder, Single Wfr | List | TBP-SWTM: Single Station Wafer Transfer System Wafer transfer

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Part number:	TBP-SWTM
Manufacturer & Category:	TBP | Automatic Transfer Systems Automatic Handling
Product & Model:	Single Station Wafer Transfer System Wafer transfer
Specification:	Vacuumfree Waferhandling Tool · Get more efficiency by your wafer handling with this system. · Reduced Particle addition by handling the wafers vertically. · Smooth motion. · Only edge contact to the wafers. · No change of hardware necessary to transfer wafers from high profile to low profile cassettes. (high-low, low-high, low-low, high-high). · Open design resulting in minimal laminar flow disturbance. · Compact footprint. · ESD save by use static dissipative materials. Specification · Controlled by Microcontroller · 16x2 digit LCD Display · RS232 port Performance · Cycle Time to transfer 25 wafer from cassette to cassette = 12 sec Options · Wafer-Identification · Wafer-Aligner · Custom modes Facilities requirements: Overall dimension (mm): SWTM 100 A 300/B 830/C 450 SWTM 125 A 300/B 830/C 450 SWTM 150 A 300/B 830/C 450 SWTM 200 A 300/B 900/C 450 · Weight : 12 kg · Full range 100-240 VAC, 50-60 Hz
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