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SPS icon red  Handling | Chemical Pumps | Categories | List | OAI-SORT300: 4 FS 4 300mm FOUP Sorter

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Part number:OAI-SORT300
Manufacturer & Category:OAI | Automatic Transfer Systems Automatic Handling
Product & Model:4 FS 4 300mm FOUP Sorter
  
Specification:300mm Wafer Sorter

TOOL HAS MULTI-FOUPS, BAR CODE READER AND ROBOTIC TRANSFER

This 300mm Wafer Sorting System is based on the OAI standard sorter configuration but can be customized to handle specific requirements. The OAI 300mm Wafer Sorter is a modular multi-foup 300mm sorting tool designed to deliver accurate id reading and recipe-driven sorting in a compact footprint. Equipped with robotic transfer, this system has Windows™ XP based software, which enables custom wafer flows and sorting recipes. This model uses an efficient positive flow filtration system, a multi-foup I/O design and bright light macroinspection system.

All systems have 4 stations to be customized for an individual user. This includes load/unload for shipping cassettes or foups, load unload for process cassettes or foups, top/bottom wafer ID reading, and wafer inspection. OAI offers a wide range of wafer handing solutions for clean room enviroments. All systems are flexible, modular, low maintenace and can be designed to handle 50 mm to 300mm wafers.
  
Image:Shop: Handling
Part number: OAI-SORT300
Product: 4 FS
Model: 4 300mm FOUP Sorter
Category: Automatic Transfer Systems