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| Part number: | OAI-SORT300 |
| Manufacturer & Category: | OAI | Automatic Transfer Systems Automatic Handling |
| Product & Model: | 4 FS 4 300mm FOUP Sorter |
| Specification: | 300mm Wafer Sorter TOOL HAS MULTI-FOUPS, BAR CODE READER AND ROBOTIC TRANSFER This 300mm Wafer Sorting System is based on the OAI standard sorter configuration but can be customized to handle specific requirements. The OAI 300mm Wafer Sorter is a modular multi-foup 300mm sorting tool designed to deliver accurate id reading and recipe-driven sorting in a compact footprint. Equipped with robotic transfer, this system has Windows™ XP based software, which enables custom wafer flows and sorting recipes. This model uses an efficient positive flow filtration system, a multi-foup I/O design and bright light macroinspection system. All systems have 4 stations to be customized for an individual user. This includes load/unload for shipping cassettes or foups, load unload for process cassettes or foups, top/bottom wafer ID reading, and wafer inspection. OAI offers a wide range of wafer handing solutions for clean room enviroments. All systems are flexible, modular, low maintenace and can be designed to handle 50 mm to 300mm wafers. |
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