Spincoater Up to 150mm
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Single Substrate Spin Processor:
SPIN150-NPP

The SPIN150 single substrate spin processor is perfectly suitable for a wide range of applications, including drying, rinsing, cleaning, and coating.

 This table-top spin processor is seamless build in a full-plastic, housing in natural polypropylene (NPP) or optional PTFE,and is suitable for processing fragments as small as 5mm up to substrates sizes up to Ø160mm (or 6”) or 4"x4".

Available models & materials:

  1. SPIN150-NPP Table-Top Model NPP                         Shop: PhotolithographyPart number: SPIN150Product: SpincoaterModel: Up to 150mmCategory: Single Wafer Spin Coaters
  2. SPIN150-PTFE Table-Top Model PTFE
  3. SPIN150-NPP-IND In-Deck NPP
  4. SPIN150-PTFE-INDIn-Deck PTFE

Specifications:

  • Max. substrate diameter: 160mm
  • Max. process chamber diameter: 202mm
  • Servo-controlled motor
  • Programmable digital process controller:
  • 2 free programmable outputs (dry contacts)
  • Dimensions: 275 (w) x 240 (d) x 450 (h) mm

Chucks & Adapters:

  • Vacuum Chuck A-V36-S45-PP up to Ø150mm (included)
  • Fragment Adapter D-V10-S50-PP for fragments (Ø >10mm up to <1”) of Semi Standard Wafer, 300-700µm (included)
  • Small Fragment Adapter D-V2.5-S50-PP for fragments (Ø>3mm up to 15mm) (optional)
  • Vacuum Chuck A-V87-S96-PP for larger substrates up to Ø200mm (optional)

Processes:

Drying, Rinsing, Coating, Cleaning

 

Please refer to our website www.spincoating.com for further details.