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Part number:	HSQ-TS3
Manufacturer & Category:	H-SQUARE | Automatic Transfer Systems Automatic Handling
Product & Model:	FOUP Station TS3
Specification:	300mm Troubleshooting Tool Set: The TS 300mm station is suited for use in wafer rescue applications, but is also an alternative to expensive sorting platforms. The tool set consists of an autmatic FOUP opener (AFO3), an automatic low-contact wafer transfer machine (LCT300-E), and a portable vacuum wand (FWAH3-E). The FOUP opener removes and secures the FOUP door at the touch of a button. The transfer machine can automatically mass-transfer wafers between various combinations of FOUPs and/or FOSBs. The tool includes a wafer mapper to insure wafer safety.
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