List

Automatic Horizontal Low Contact Wafer Transfer for 200mm:
- Safely mass transfers a full cassette of wafers to another cassette
- Wafers are gently lifted midpoint in the cassette slots before extracting or loading them to minimize contact with the cassette which could cause particulation.
- Optical and mechanical sensors combined with software logic guard against operator errors such as trying to transfer wafers into a cassette which is already loaded with wafers.
- User-friendly fail-safe operation features simple one-button actuation and LEDs to guide operator through the transfer sequence.
- Sturdy construction assures high reliability and robustness required in high throughput fabs.
- Small footprint: 58,5cm x 25,5cm

Class 1 cleanroom compatible.