FAQ Vibration Sensor

Does the vibration sensor need maintenance or do you need to calibrate the sensor?
Our vibration sensors use MEMs components, there is no need for calibration or maintenance.


What is the Warranty of the vibration sensors?
We offer a 12 month warranty.


Can the vibration sensors be used in a wet environment?
They can be used in a high moisture environment. To enable them for wet chemical environment however, additional protective casing (which will be made based on specific environment) will have to be ordered.


What is the installed base for these vibration sensors? How many sensors have been installed?
VS1-R: 88 sets in AMAT CMP Reflexion and Reflexion LK system, Pad-conditioner arm vibration monitoring

VS1-R: 10 sets in AMAT Centura RTP process, for monitoring lifter up/down stability. 
VS2-SI: 120 sets in AMAT Reflexion and Reflexion LK system, for pad conditioner arm vibration monitoring.

How does this vibration sensor incorporate into the tool and output data? 
And how can the sensor output and software be integrated in the fab control system?
The offline vibration sensors VS-1 is connected via USB to a laptop, and run on our VS software. 
The online vibration sensors (VS-1R, VS-2SI) can be linked up to the host / IT via an analogue 0~10v IO port.  If there are no spare ports available, we will deploy the use of our SECS/GEM system. 
By this, the vibration sensors controller will be connected to a DAQ, which will be linked to a server. The server will package the data and deliver it to the host/IT.

 
Can the vibration sensor be connected with Modbus?
The output from our vibration sensors is analogue O/P. TCP-IP is a digital protocol. To connect to this, we need our SECS/GEM system.

How can the vibration sensor be integrated in the Applied Reflexion / LK?
We will use the spare User IO, configuring and assigning SVID to the IO.


How can the vibration sensor be integrated in an Ebara polisher?
We will use our SECS/GEM system to stream the data to host (Fab control system). This streaming is done by S1F3.
How does the Stability Index work?
The computed Stability Index is used to represent the vibration stability of a period of data. This function allows the vibration sensor to capture spiking even in a 1Hz sampling


File:
Download here >
How does the Stability Index (SI) works
 

Documentation

Vibration-sensor Basic Flow Chart for New Tool Setup
Vibration-sensor Basic Flow Chart for New Tool Setup
Vibration sensor SECS/GEM Configuration for the VS-2SI Sensor (Wired / Wireless)
Vibration sensor SECS/GEM Configuration for the VS-2SI Sensor (Wired / Wireless)
Vibration sensor how does the Stability Index (SI) work?
Vibration sensor how does the Stability Index (SI) work?