An FR-Thermal VIS/NIR configured to operate in the 360-1000 nm spectral range is used. The hot plate integrated on the tool, is controlled either manually or through the FR-Monitor software. In the present case the thickness and the refractive index (Cauchy model) of the film are monitored during the heating at a constant rate. The polymers investigated were poly(iso-butyl methacrylate) (PiBMA), poly(n-propyl methacrylate) (PPMA) and poly(ethyl methacrylate) (PEMA) and their films are spin coated on silicon wafers. Prior to the measurements the samples have been Post Apply Baked at 145oC for 15min.
Conclusions: The glass transmission temperature of polymeric films was measured with an FR-Basic equipped with the FR-Thermal kit. In a similar way other thermal parameters of polymeric films can be also determined e.g. Degradation temperature of polymeric films.
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