FR-Scanner

Affordable film thickness mapping of your

deposition layer?
 

Is scanning speed on an 8 inch wafer essential?

Without compromise to accuracy or price?

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Automated, ultra-fast & accurate mapping of thickness, refractive index, uniformity, and other optical properties of film and coating on a semiconductor wafer. Our film thickness scanner offers 625 measurements per minute on an 8 inch wafer.
Benefits
  • Excellent film thickness mapping 
  • At high speed
  • Allows you to work off-line on your data or video
"Developed and manufactured in Europe by a spin-off institute of Microelectronics NCSR 'Demokritos'
by a crew of PhD physics"

High speed
scanning

Very high speed sample scanning by rotating the stage and by moving the optical  head linearly on top (polar scanning).
625 measurements per minute on an 8 inch wafer, 5 points in 4 sec, 25 points in 9 sec.

Excellent film
thickness mapping

No bending or moving fibers, excellent performance
and accuracy.

24/7
support

A team of PhD physics offers 24/7 support. Long life time of the light source, 10000 h+, is guaranteed.