FR-pOrtable thin film measurement, can be either mounted on the supplied stage or can easily be transformed to a handheld thickness measurement tool to be placed over the sample under characterization. This way, FR-pOrtable is the optical characterization tool for in the field applications.
Our FR-pOrtable unique features
Powered through USB, no-power cable is required
The lowest price in the market.
A wide range of accessible materials
process recipes for many materials such as Al2O3, Pt, Ru, HfO2, TiO2, ZrO2, ZnO, AZO (Al:ZnO), TiN…
Excellent process development support
Harvard lab scientists provide evidence based assistance to customers.
Streamlined chamber design and small chamber volume allow 6-10 cycles/min, e.g. up to 1.2nm/min Al2O3 (best in class).