Semiconductor Diffusion Heater elements (1300C)

Find your diffusion heaters solutions at SPS-Europe

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                                 ✔ High temperature operation    Longest life  Cost-effective

Are you looking for 1:1 diffusion heater element retrofit? Do you want OEM quality and fast delivery?
For more than 40 years Thermcraft supplies high quality semiconductor replacement diffusion heater elements to the semiconductor industry, using knowledge gained from all facets of thermal engineering. We offer custom designed diffusion heating elements and 'plug and heat' solutions for most existing horizontal or vertical diffusion furnace heaters. As 1:1 heater element retrofit or for new applications. Diffusion Duracraft™ series heating elements are heavy gauge APM wire type elements, similar to most standard diffusion heater elements for operating temperatures up to 1300°C (2460°F). Rapid delivery and off-the-shelf pricing make these elements the cost-effective solution for your semiconductor heating needs. We offer diffusion furnaces elements, refurbishing and heater element accessories including standard and custom sized vestibule blocks are available as well as diffusion furnace collars and discs.
 

DuracraftTM diffusion furnace elements

Diffusion furnace elements for
cost-effective high temperature operation.
Diffusion furnace elements for high temperature operation improved performance for temperature cycling.
Diffusion furnace elements for highest temperature operation and large temperature swings longest life.
Models
DC-1300
DC-1300Plus
DCHT-500

Operating

Temperature

400°C - 1300°C
400°C - 1300°C
400°C - 1300°C

Shell

Stainless steel
Stainless steel
Stainless steel
Insulation
Vacuum formed, 97% Alymina
Vacuum formed, 97% Alymina
Vacuum formed, 97% Alymina
Wire
Heavy gauge FeCrAI
Heavy gauge FeCrAI
Heavy gauge powered metal FeCrAI
Inner coating
Zirconia oxide
Zirconia oxide
Zirconia oxide
Spacers
Standard
Self-locking
Self-locking
Bore size
Please specify
Please specify
Please specify
Applications
Vertical or horizontal, LPCVD and oxidation/diffusion processes, up to 1300°C, with typical lifetimes of 5 years at low to mid-temperature range.

Vertical or horizontal, LPCVD and oxidation/diffusion processes, up to 1300°C, with typical lifetimes of 5 years at low to mid-temperature range.

Vertical or horizontal, LPCVD and oxidation/diffusion processes, up to 1300°C, with typical lifetimes of 5 years at low to mid-temperature range.
 
Why rebuilding a diffusion heater element pays off
Rebuilding of a failed heater element can offer great cost-savings when compared to a completely new heating element. Each rebuilt diffusion heating element is carefully reverse engineered. Diffusion heater element components are the same as used by the OEM. We use highest quality Kanthal APM heater wire, interlocking spacers for constant coil spacing and stability. Your refurbished heating elements will be an exact replacement with the dimensional, electrical, and operating characteristics of the original OEM.
 

40 years of installed base of heater elements in Europe
Examples of diffusion furnace heater elements in use since many years by a large installed base of European Semiconductor fabs: OEM Part# TEL Tokyo Electron: VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-32-001, VOS-40-017, VMU-54-001, VOS-56-003 Hitachi Kokusai: F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648 Axcelis: ST-200 SVG: 602783-02, 602783-03 Various Other OEM Models: UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L.


If you are looking to refurbish a diffusion heater that is not listed,
please contact SPS-Europe +31 341 360590.
 

Why self-locking comb spacers extend the lifetime of your diffusion heating element?
Self-locking comb spacers lock together around the circumference of the element, maintaining constant coil spacing and total support of eacht turn of the resistance coil. This design keeps the spacers in place throughout repeated temperature cycling.

 
Furnace products and heating systems
Heating elements, gas filters, insulation collars and discs and high temp vestibule blocks.








 

 

GasproTM TEM filters

Full range of In-Line Gas Filters for filtration of semiconductor gases. PTFE-316L, or all-316L In-Line Gas Filters with commonly used connections for easy installation wherever a good flow rate and low pressure drop is required in limited space.

Vestibule blocks

High Purity vacuum-formed ceramic fiber with a low sodium inorganic bond, insulation rated up to 1500°C. Custom-Made available to fit all diffusion furnaces.

Insulation Collars & Disks

Lightweight insulation for temperature stability. All the Hiltex insulation collars are environmentally friendly and safe to work with. Alf and Quartz fibres are non-respirable due to their diameter and length.