✔Metal Carriers ✔Custom Cassettes ✔Plastic Process Boats ✔SEMI standard
Increased cleanliness standards and robotic handling in semiconductor wafer fabs require a non-contaminating, stable wafer cassette with high mechanical interface capability. Our wafer cassettes & shipping carriers are available for any application in different materials and sizes: including hard clear anodized aluminum, and electro polished nickel. We offer high vacuum metal cassettes and 316SST stainless Steel for bake-out processes up to 550˚C. We supply process boats in various high grade plastics, including Teflon® carriers
Benefits of our cassettes and process boats:
SEMI-standard, suitable for robot handling
Clean and secure wafer protection
Metal Carriers &
Where wafer positioning is important or where elevated temperatures cause warpage to other carriers
Bake Cassettes SST
Stainless steel (316SST) wafer cassette for high temperature wafer bake-out applications. Maximum continuous operating temperature up to 550˚C without causing distortion.
The PFA process cassettes are ideal for wet chemistry processing and are made to the industry standard designs. This makes them suitable as drop in replacement for your current PFA cassettes.