3" (75mm) Flat Aligner - Automatic

Part number: AFEZ-3
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Specifications

Part number
AFEZ-3
TAG 1
3" (75mm)
TAG 2
Automatic
TAG 3
25 Slot

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Product description

3" (75mm) Flat Aligner - Automatic

Model: AFEZ-3

This fully automatic microprocessor controlled flat finder provides for wafer flat finding with minimal operator involvement. To align wafer flats the operator places the carrier on the unit and pushes the “RUN” switch. All wafer flats are automatically aligned to the bottom, and then relocated to one of the 16 positions as set by the operator. Accuracy is better than plus or minus one degree. No manual operation or override is available. All rotation is controlled at a constant speed for minimal particulate generation. Final wafer flat a 16 position rotary switch mounted controls location near the RUN switch. Standard adjustment points are 0°, 2°, 45°, 88°, 90°, 135°, 176°, 178°, 180°, 182°, 184°, 225°, 270°, 272°, 315° and 358° degrees.

Specifications:
  • For 3" (75mm) Wafers
  • For 25 Slot Cassettes
  • Flat Finder / Aligner
  • Automatic System
  • Material Stage: Anti-Static Polypropylene
  • Material Roller: Anti-Static Polyurethane
  • ESD-Safe
  • Aligning Accuracy: Better than +/- 1°
  • Class 1 Cleanroom Compatible.
  • EZ Guide aligning assistance for correct cassette placement

*** NOTE: Please specify cassette model number(s) when ordering ***