The Automatic Wafer Moverô (AWM) is an electromechanical stand-alone tabletop automation system designed to move single wafers between two process cassettes. The automation platform is controlled by use of a storable touchscreen display. The AWM can be ordered from the factory adjusted to handle either 75mm, 100mm, 150mm or 200mm wafers. Each system can be uniquely setup to handle customer specifc wafer cassette(s), wafer thickness or unique wafer attributes. Wafer Movers are designed to alleviate the need for manual wafer handling methods, reduce scratching and wafer breakage. An H-Square Wafer Mover platform will effectively replace the need for a vacuum wand, wafer tweezers, or an expensive sorter platform. Operators will interface with either RECIPE mode or a MANUAL mode for fast, safe, and easy tool operation.
- Suitable for double-sided processed wafers
- No vacuum contact
- Up to 4" wafers
- Also available for 3" (75mm) up to 8" (200mm)
- Soft contact
- Safe economical single wafer transfer system
- ESD Class 1
- 230 VAC
*** NOTE: Please specify cassette model numbers when ordering ***
Contact SPS-Europe for special requests!