Model: MDA-400LJ (als available for 6" > MDA400LJ-6)
The MDA-400LJ is used for Semiconductor & Application Process. This machine can provide a higher performance of your process. It is an ideal and economical tool for Universities and Research centers.
- Manual & pneumatic control system
- Sample size: Up to 4" diameter
- Mask size: Up to 5" × 5"
- UV LED light source with power supply
- Wavelength 365 nm (i-line)
- Dual CCD zoom microscope and dual monitor
- Alignment tooling module with X, Y, Z and theta motion (micrometer)
- Wedge error compensation system (air bearing type)
- Dimensions: 800 (W) x 800 (D) x 800 (H) mm
- Resolution: <1 micron
- Long System Life-Time
- Weight: 120 kg
- Warranty: 1 year