4" Mask Aligner and Exposure System - UV LED Light Source

Part number: MDA-400LJ
Price on quote


Part number
Substrate size
4" (100mm)
System type
Light source
UV LED Light Source

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Brochure Mask Aligners 2017


Product description

4" Mask Aligner (Manual, LED Light Source)

Model: MDA-400LJ (als available for 6" > MDA400LJ-6)

The MDA-400LJ is used for Semiconductor & Application Process. This machine can provide a higher performance of your process. It is an ideal and economical tool for Universities and Research centers.

Standard Features:
  • Manual & pneumatic control system
  • Sample size: Up to 4" diameter
  • Mask size: Up to 5" 5"
  • UV LED light source with power supply
  • Wavelength 365 nm (i-line)
  • Dual CCD zoom microscope and dual monitor
  • Alignment tooling module with X, Y, Z and theta motion (micrometer)
  • Wedge error compensation system (air bearing type)
  • Dimensions: 800 (W) x 800 (D) x 800 (H) mm
  • Resolution: <1 micron
  • Long System Life-Time
  • Weight: 120 kg
  • Warranty: 1 year