5" (125mm) Vertical Wafer Transfer - Automatic

Part number: WTM125
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Specifications

Part number
WTM125
TAG 1
5" (125mm)
TAG 2
Automatic System
TAG 3
Optional Alignment
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Product description

5" (125mm) Vertical Wafer Transfer - Automatic

Model: WTM125

The WTM Mass Wafer Transfer tool is capable of wafer transfer from plastic to plastic. With the automatic system it is possible to transfer all wafers of a cassette to the other. The system is equipped with two cassette-stations, (optional) mechanical wafer notch/flat aligner and a gripper mechanism. Models are available in 100, 125, 150 and 200mm wafers.

Specifcations:
  • For 5" (125mm) Wafers
  • Wafer Thickness: 380um - 700um
  • Vertical Mass Wafer Transfer
  • Automatic System
  • ESD-Safe
  • No Vacuum Required (Edge Gripping)
  • No Wafer Alignment (Optional)
  • Throughput up to 2000 wph
  • Windows Operating System
  • RFID Cassette Identification on Request
  • Full SECS/GEM Compliance

Possible Transfer Modes:
  • Storage Cassette to Process Cassette
  • Process Cassette to Teflon Cassette
  • High Profile Cassette to Low Profile Cassette

*** Note: Please specify cassette model numbers when ordering ***