6" (150mm) 4-Cassette Sorter

Part number: FCS1500
Price on quote
Quantity

Specifications

Part number
FCS1500
TAG 1
6" (150mm)
TAG 2
Horizontal Handling
TAG 3
Without OCR
Brand

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Documentation

Wafer Sorters Sheet SPS-Europe

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Product description

6" (150mm) 4-Cassette Sorter

Model: FCS1500

The FCS-Series is designed for automatic sorting based on wafer Idís. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and a linear-robot (Optical Wafer notch/flat Aligner and ID Reader are optional). 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.

Models available for:
  • 4" (100mm)
  • 5" (125mm)
  • 6" (150mm)
  • 8" (200mm)

Specifications:
  • For 6" (150mm) Wafers
  • Wafer Thickness: 220µ - 700µ
  • 4 Cassette Sorter
  • Automatic System
  • ESD-Safe
  • 25 Slot Cassettes
  • Vacuum Required
  • Throughput up to 700 wph
  • Footprint: 1100 mm x 800 mm

Optional Features:
  • RFID Cassette Identification
  • Wafer Backside ID Reading
  • Vacuum Free Edge Gripping
  • Thin Wafer Capability
  • Wafer Flipping
  • 13/15 Slot Cassette Capability
  • Full SECS/GEM Compliance
  • Wafer Alignment
  • Barcode / OCR Reading

*** Note: Please specify cassette model numbers when ordering ***