(with 602299 EU-Power Cord)
Automatic "Flat" Finder / Escalator aligns and escalates wafers for ID mark reading. Unit features operator selected tilt angle for enhanced ID readability. Optional LED light bank furnishes optimal lighting conditions for ID reading. The patented alignment mechanisms result in exceptional aligning accuracy. User-friendly control panel facilitates ease of use. Cost-effective design and operator visual reading provides wafer tracking at a fraction of the cost of fully automated OCR systems. ESD safe construction. Class 1 cleanroom compatible.
PLC program version for flat align only, flat/escalate, or edge inspection roll programming. ESD safe. With integrated LED light.
- For 6" (150mm) Wafers
- Flat Aligner
- Automatic System
- Cycle time< 24s
- Adjustable Viewing Angle (up to 30°)
- User-Friendly Controls
- Class 1 Cleanroom Compatible
- Small Table-Top Footprint
Custom Design Features:
- LED Light Bank
- 12 or 13 Slot Designs
- AET Units with Thin Wafer Lift Combs
*** NOTE: Please specify cassette model number(s) when ordering ***
Contact SPS-Europe for special requests!