6" Mask Aligner and Exposure System - 350W UV Lamp

Part number: MDA-400M-6
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Quantity

Specifications

Part number
MDA-400M-6
Substrate size
6" (150mm)
System type
Manual
Light source
350W UV Lamp
Brand

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Documentation

Mask Aligners Brochure 2017

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Product description

6" Mask Aligner (Manual)

Model: MDA-400M-6

The MDA-400M-6 is designed for research organizations who want to work with a state of the art technology mask aligner. This highly accurate system allows researchers to easily develop their processes on wafers up to 6".

Standard Features:
  • Manual control system
  • PC & PLC control
  • Sample size: Up to 6" diameter
  • Mask holder size: Up to 7" x 7"
  • UV lamp: 350W
  • 350W mercury short arc lamp& power supply
  • Dual CCD zoom microscope and 19" LCD monitor
  • Large area stationary alignment tooling module with X, Y, Z and theta motion
  • Wedge error compensation (leveling type)
  • Dimensions: 1000 (W) x 917 (D) x 781 (H) mm
  • Weight: 250 kg
  • Warranty: 1 year