The MDA-600S is widely used for MEMS, LED and Semiconductor industry. It can provide a higher performance of alingment accuracy and resolution. It is an ideal and economical tool for Universities and Research Centers.
- Type: PC control semi auto
- Mask size: up to 7" x 7"
- Substrate size: piece to 6"
- UV lamp & Power: 350W & power supply
- Uniform beam size: 6.25" x 6.25"
- Beam Uniformity: <±5%
- Beam wavelength: 350 ~ 450nm
- 365nm Intensity: ~25mW/cm2
- Alignment accuracy: 1um
- Process resolution: 1um@1um PR thickness with vacuum contact
- Process mode: Soft, Hard, Vacuum contact & Proximity
- Substrate chuck moving: x,y,z & (theta)