6" Mask Aligner and Exposure System - 350W UV Lamp

Part number: MDA-600S
Price on quote


Part number
Substrate size
6" (150mm)
System type
Semi Automatic
Light source
350W UV Lamp

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Mask Aligners Brochure 2017


Product description

6" Mask Aligner and Exposure System

Model: MDA-600S

The MDA-600S is widely used for MEMS, LED and Semiconductor industry. It can provide a higher performance of alingment accuracy and resolution. It is an ideal and economical tool for Universities and Research Centers.

  • Type: PC control semi auto
  • Mask size: up to 7" x 7"
  • Substrate size: piece to 6"
  • UV lamp & Power: 350W & power supply
  • Uniform beam size: 6.25" x 6.25"
  • Beam Uniformity: <5%
  • Beam wavelength: 350 ~ 450nm
  • 365nm Intensity: ~25mW/cm2
  • Alignment accuracy: 1um
  • Process resolution: 1um@1um PR thickness with vacuum contact
  • Process mode: Soft, Hard, Vacuum contact & Proximity
  • Substrate chuck moving: x,y,z & (theta)