MIDAS

8" Mask Aligner and Exposure System - 1000W UV Lamp

8" Mask Aligner and Exposure System - 1000W UV Lamp
MIDAS

8" Mask Aligner and Exposure System - 1000W UV Lamp

Product description
Specifications
Files & links
8" Mask Aligner and Exposure System

Model: MDA-80MS

Specifications:
  • Type: PC control Semi Automatic System
  • Mask size: up to 9" x 9"
  • Substrate size: piece to diameter 8"
  • UV lamp & Power: 1kW & power supply
  • Uniform beam size: 9.25" x 9.25"
  • Beam Uniformity: <±5%
  • Beam wavelength: 350 ~ 450nm
  • 365nm Intensity: 15 ~ 25mW/cm2
  • Alignment accuracy: 1um
  • Process resolution: 1um@1um PR thickness with vacuum contact
  • Process mode: Soft, Hard, Vacuum contact & Proximity
  • Substrate chuck moving: X, Y (Manual), Z, (theta) (Motorized)