- Type: Full automatic (Mask Aligner)
- Mask size: up to 9" x 9"
- Substrate size: 8"
- UV lamp & Power: 2kW & power supply
- Uniform beam size: 10.25" x 10.25"
- Beam Uniformity: <±5%
- Beam wavelength: 350 ~ 450nm
- 365nm Intensity: ~25mW/cm2
- Alignment accuracy: 1um
- Process resolution: 1um@1um PR thickness with vacuum contact
- Process mode: Soft, Hard, Vacuum contact & Proximity
- Substrate chuck moving: X, Y, Z & (theta) (Motorized)
- Pre-aligner: ±50um