KL 5300 Series General Purpose Positive Thin

Part number: KL5300
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Specifications

Part number
KL5300
TAG 1
Positive photoresist
TAG 2
0-2.5 µm FT
TAG 3
General Purpose Thin
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Documentation

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Product description

KL5300 series are positive photoresists for use in i-Line, g-Line and broadband applications. They offer high sensitivity, high resolution and excellent process latitude.
 

  • Cover 0 – 2.5 µm in a single coat
  • Designed for use with industry standard TMAH 0.26N developers
  • Achieve resolution 0.55 µm
  • Competes with S1805™, S1808™, S1811™, S1813™, S1818™