KL 6000 Series General Purpose Positive Thick

Part number: KL6000
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Specifications

Part number
KL6000
TAG 1
Positive Photoresist
TAG 2
2.5-12 µm FT
TAG 3
General Purpose Thick
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Product description

KL 6000 series are positive photoresists for use in i-Line, g-Line and broadband applications. KL6000 offers high sensitivity, high throughput, and excellent process latitude.
 

  • Cover 2.5 – 12 µm in a single coat
  • Designed for use with industry standard TMAH 0.26N developers
  • No PEB necessary
  • Competes with SPR™ 220-3.0/S1827™, SPR™ 220-4.5, SPR™ 220-7.0, and S1827™