KL 6000 series are positive photoresists for use in i-Line, g-Line and broadband applications. KL6000 offers high sensitivity, high throughput, and excellent process latitude.
- Cover 2.5 – 12 µm in a single coat
- Designed for use with industry standard TMAH 0.26N developers
- No PEB necessary
- Competes with SPR™ 220-3.0/S1827™, SPR™ 220-4.5, SPR™ 220-7.0, and S1827™