PicoMaster 100 Base System - UV Direct Laser Writer

Part number: PM-100
Price on quote
Quantity

Specifications

Part number
PM-100
Wafer size
4" (100mm)
System type
Table-Top System
Structure
< 300 nm features
Height
736 mm
Width
600 mm
Depth
600 mm
Brand

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Documentation

PicoMaster 100 Brochure
PicoMaster Systems Comparison
Direct Laser Writer System SPS-Europe Sheet
UV LED flood light option sheet

Reviews

Product description

PicoMaster 100 Base System - UV Direct Laser Writer

Model: PicoMaster 100

UV Direct Laser Writer for Maskless Lithography
The PicoMaster 100 is a versatile UV Laser Writer with ultra high precision components, specifically designed to give the user the highest degree of freedom to create micro structures in photo sensitive layers. The rasterizing principle of the machine ensures proper and constant exposure over the whole surface. Scanning the 4" substrate at high speed and stepping the laser head with a software adjustable pitch.

Supporting up to 4095 levels of grayscale or pure binary mode allows for 3D optical structures, surface structures as well as mask projects makes the PicoMaster 100 the ideal Litho tool for R&D. When connected to an air conditioning unit to supply conditioned air, a build in Hepa filter will create a clean cross flow. The massive base frame supported by isolation mounts filter out ground frequencies to ensure minimum vibrations in the system.

Optics:
The full optical path is contained in a small easily changeable module. By keeping the optical path as short as possible, the pointing stability is greatly increased. The laser controlled autofocus system automatically corrects for surface errors or wedge shaped substrates.

Fully automated NA switch on request.

Specification Including:
  • Capacity up to 4" x 4" substrates
  • 405nm long life diode laser
  • GDSII support
  • Manual Z adjustment 0-5 mm
  • On-axis red laser controlled auto-focus
  • Grayscale exposure
  • 1 year warranty

Dimensions:
  • Height: 750 mm
  • Width: 600 mm
  • Depth: 600 mm (not including optional air duct)

Weight: 260 kg

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