PicoMaster 150 Base System - UV Direct Laser Writer

Part number: PM-150
Price on quote
Quantity

Specifications

Part number
PM-150
Wafer size
5" (125mm)
System type
Stand-Alone System
Structure
< 300 nm features
Brand

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Documentation

Picomaster 150 brochure

Reviews

Product description

Meet the smallest high quality laser beam spot available in the market. The PicoMaster 150 is a versatile UV laser writer



with ultra high precision components, specifically designed to give the user the highest degree of freedom to create micro structures in photo sensitive layers.



The PicoMaster 150 is a stand alone system. All components are enclosed, including control rack, vacuum pump and control PC. This allows for quick and easy installation. A



touch screen for operating the machine is attached to the frame.







The system includes a 405 nm optical module capable of writing structures as small as 300 nm in photo resist layers. This user friendly tool supports up to 4095 levels of grayscale or pure binary mode and allows for 3D optical structures, surface structures as well as mask







<strong>Specification Including:</strong>



- Standalone system



- Up to 6" x 6" substrates



- Integrated computer included



- Integrated vacuum pump



- Manual Z adjustment up to 10 mm



- Top side alignment



- Long life time 405nm diode laser



- Raster mode (GDS, BMP)



- Vector mode (Gerber)



- 4095 grayscale levels



- Autofocus



- 0.3 µm high-res write mode







- 1 year warranty



- Crating for export



- Training



- Remote support



<strong>Back Side Alignment on the Picomaster systems.</strong>







Back Side Alignment (BSA) on the Picomaster systems is performed by means of 2 cameras with telecentric illumination and vision software for the processing of the images. The cameras are mounted on a fixed position and are only able to capture image from the backside at this position. Vision software processes the images and enable the system to automatically detect shapes and measure their position.



<strong>Specifications BSA direct laser writer</strong>



Cameras: 5.2M pixel monochrome, USB 3 interface



FOV: 2.5 x 2 mm



Pixel resolution: 1 μm



Illumination: 568nm coaxial telecentric illumination



Vision software: Cognex VPRO or Adaptive Vision Studio



Measuring resolution by means of interpolating algorithms: <100 nm



Final alignment accuracy: <2 μm



Measuring position: 90mm centre to centre. This position can be changed on request.

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