PicoMaster 200 Base System - UV Direct Laser Writer

Part number: PM-200
Price on quote
Quantity

Specifications

Part number
PM-200
Wafer size
8" (200mm)
System type
Stand-Alone System
Structure
< 300 nm features
Height
2065 mm
Width
1260 mm
Depth
1297 mm
Brand

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Documentation

PicoMaster 200 Brochure
PicoMaster Systems Comparison
Direct Laser Writer System SPS-Europe Sheet
UV LED flood light option sheet

Reviews

Product description

Meet the smallest high quality laser beam spot available in the market. The PicoMaster 200 is a versatile UV laser writer
with ultra high precision components, specifically designed to give the user the highest degree of freedom to create micro structures in photo sensitive layers.
The PicoMaster 200 is a stand alone system. All components are enclosed, including control rack, vacuum pump and control PC. This allows for quick and easy installation. A
touch screen for operating the machine is attached to the frame.
The system includes a 405 nm optical module capable of writing structures as small as 300 nm in photo resist layers. This user friendly tool supports up to 4095 levels of grayscale or pure binary mode and allows for 3D optical structures, surface structures as well as mask projects. Real time laser controlled auto focus and laser intensity control ensure high quality imaging during the entire exposure process.
The PicoMaster Project Manager software is included in the package and can be freely installed on any Windows based PC. When connected to an air conditioning unit to supply conditioned air, a built in Hepa filter creates a clean cross flow. The massive base frame supported by isolation mounts filters out ground frequencies to ensure minimum vibrations in the system.
Specification Including:
- Standalone system
- Up to 8" x 8" substrates
- Integrated computer included
- Integrated vacuum pump
- Manual Z adjustment up to 10 mm
- Top side alignment
- Long life time 405nm diode laser
- Raster mode (GDS, BMP)
- Vector mode (Gerber)
- 4095 grayscale levels
- Autofocus
- 0.3 µm high-res write mode
- 1 year warranty
- Crating for export
- Training
- Remote support
 
Back Side Alignment on the Picomaster systems.
Back Side Alignment (BSA) on the Picomaster systems is performed by means of 2 cameras with telecentric illumination and vision software for the processing of the images. The cameras are mounted on a fixed position and are only able to capture image from the backside at this position. Vision software processes the images and enable the system to automatically detect shapes and measure their position.
Specifications BSA direct laser writer
Cameras: 5.2M pixel monochrome, USB 3 interface
FOV: 2.5 x 2 mm
Pixel resolution: 1 μm
Illumination: 568nm coaxial telecentric illumination
Vision software: Cognex VPRO or Adaptive Vision Studio
Measuring resolution by means of interpolating algorithms: <100 nm
Final alignment accuracy: <2 μm



Measuring position: 90mm centre to centre. This position can be changed on request.

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