PicoMaster 200 Base System - UV Direct Laser Writer

Part number: PM-200
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Specifications

Part number
PM-200
Wafer size
8" (200mm)
System type
Stand-Alone System
Structure
< 300 nm features
Height
2065 mm
Width
1260 mm
Depth
1297 mm
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Documentation

PicoMaster 200 Brochure
PicoMaster Systems Comparison
Direct Laser Writer System SPS-Europe Sheet
UV LED flood light option sheet

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Product description

PicoMaster 200 Base System - UV Direct Laser Writer

Model: PicoMaster 200

UV Direct Laser Writer for Maskless Lithography
The PicoMaster 200, which supports wafers and substrates up to 8" square, is a versatile UV laser writer with ultra high precision components, specifically designed to give the user the highest degree of freedom to create micro structures in photo sensitive layers. The rasterizing principle of the machine ensures proper and constant exposure over the whole surface. Scanning the substrate at high speed and stepping the laser head with a software adjustable pitch.

Supporting up to 4095 levels of grayscale or pure binary mode allows for 3D optical structures, surface structures as well as mask projects makes the PicoMaster the ideal Litho tool for R&D as well as production. The PicoMaster is a standalone, fully enclosed system. All required components, including control rack and vacuum pump are within the enclosure, which allows for quick and easy installation. When connected to an air conditioning unit to supply conditioned air, a build in Hepa filter will create a clean cross flow. The massive base frame supported by isolation mounts filter out ground frequencies to ensure minimum vibrations in the system.

Optics:
The full optical path is contained in a small easily changeable module. By keeping the optical path as short as possible, the pointing stability is greatly increased. The laser controlled autofocus system automatically corrects for surface errors or wedge shaped substrates.

Fully automated NA switch on request.

Specification Including:
  • Capacity up to 8" x 8" substrates
  • 405nm long life diode laser
  • GDSII support
  • Manual Z adjustment 0-5 mm
  • On-axis red laser controlled auto-focus
  • Grayscale exposure
  • Vacuum pump integrated in system
  • 1 year warranty

Dimensions:
  • Width: 1260 mm (with fixed screen), 860 mm (without screen)
  • Depth: 1297 mm
  • Height: 2065 mm (to ceiling)

Weight: 700 kg


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