POLOS
SPIN150i-NPP Single Substrate Spin Processor
POLOS
SPIN150i-NPP Single Substrate Spin Processor
The POLOS SPIN150i is a versatile and high-quality substrate spin coater, made of PTFE or NPP. It is specifically designed for R&D and low volume production. Desktop Version for manual or automated (optional) chemical dispense.
Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes
Specifications:
- Up to 6" (150 mm) Wafers
- Up to 4" x 4" (100 mm) square Substrates
- Material: Natural Polypropylene (NPP)
- Easy, step- by- step recipe programming via large colour touchscreen
- Transparent Lid with syringe holder for central dispensing
- Electro-magnetic safety lid lock
- N2 diffuser for N2 purge during process
- 12.000 RPM (Depending on Substrate / Chuck)
- High Acceleration and Accuracy
- Manual Chemical Dispense
- CW & CCW Rotation
- (Detachable) Colour Touchscreen with Customisable Icons
- Unlimited Program Storage for recipes with multiple steps each
- USB Port
Including
- 1 x A-V36-S45-NPP-HD Vacuum Chuck
- 1 x D-V10-S50-NPP-HD Fragment Adapter
For more information visit:
www.spincoating.com
Brand
POLOS
Product Number
41096
Material
NPP
Wafer size
Up to 6" (150 mm)
Substrate size
For up to 4" x 4" (100 mm)
Type
Desktop Version
Drive unit
Up to 12.000 RPM
Acceleration/Deceleration
1-30.000 RPM
Programs
CW, CCW Rotation and Puddle option
Status
Request information
Links
For more information go to: