Photolithography

Products for safe storage and handling of reticles,
as well as mask aligners and uv meters.

APT

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APT German Manufacturer and Developer of Electronic Components and Customer-specific Systems.

Main activities:
  • Wafer Handling Inspection Systems
  • Single Wafer Spin Processors
  • Automotive industry: welding robot, linear control
  • POLOS Spin Processor and spin coaters - www.spincoating.com
Photolithography
Chuck
APT
 
Mechanical Chuck
NPP
6" (150mm)
Photolithography
Chuck
APT
 
Vacuum Chuck
NPP
HD Version
Photolithography
Chuck
APT
 
Mechanical Chuck
NPP
4" (100mm)