Photolithography

Products for safe storage and handling of reticles,
as well as mask aligners and uv meters.

Hotplate | Table Top | R&D Tool

SPS-Europe offers the modular setup of a Table Top Hotplate. This Hotplate enables easy plate (chuck) exchange and upgradeable options, making this a versatile and affordable tool for R&D and pilot lines. The Hotplate is suitable for soft bake as well as hard bake processes, and curing of photo resist, epoxy or any other work requiring precise temperature control. Options for the Hotplate are a hinged lid, lifting pins or proximity pins.