Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

Measurement Systems | Film Characterization

SPS-Europe offers portable, real-time measurement systems and sensors. For on the spot monitoring of your tools or process achievements. For film characterization we have a USB-powered, portable and handheld spectroscopic reflectance tool the FR-Portable. The optimum solution for fast, accurate and automatic characterization of thickness, optical properties, roughness of single films or stack of films over large areas or preselected positions through scanning you need the FR-Scanner. We supply also custom build film measurement system.