Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

Film Measurement Systems

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Film Measurement Systems (3)
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Non-destructive real-time characterization of thin film layers and coatings with thickness in the 1nm-500um range. FR-tools provide reflectance, absorbance and transmittance measurements at the workfloor. With FR-tools the thickness, optical constants (n & k), uniformity, colour of suspended and supported stacks are measured with high accuracy in static and dynamic conditions.