Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

APT

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SPIN150i-200i In-Deck (4)
POLOS-200 In-Deck (2)
POLOS-300 In-Deck (2)
Wafer Cleaning (2)
Substrate Holder (1)
Probe Card (5)
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APT German Manufacturer and Developer of Electronic Components and Customer-specific Systems.

Main activities:
  • Wafer Handling Inspection Systems
  • Single Wafer Spin Processors
  • Automotive industry: welding robot, linear control
  • POLOS Spin Processor and spin coaters - www.spincoating.com
Wetprocess
SPIN150i-200i In-Deck
APT
 
SPIN200i-NPP-INT Single Substrate Spin Processor

Wetprocess » Cleaning » SPIN150i-200i In-Deck
Up to 8" (200mm)
NPP
In-Deck Version
Wetprocess
SPIN150i-200i In-Deck
APT
 
SPIN200i-PTFE-INT Single Substrate Spin Processor

Wetprocess » Cleaning » SPIN150i-200i In-Deck
Up to 8" (200mm)
PTFE
In-Deck Version
Wetprocess
SPIN150i-200i In-Deck
APT
 
SPIN150i-NPP-INT Single Substrate Spin Processor

Wetprocess » Cleaning » SPIN150i-200i In-Deck
Up to 6" (150mm)
NPP
In-Deck Version
Wetprocess
SPIN150i-200i In-Deck
APT
 
SPIN150i-PTFE-INT Single Substrate Spin Processor

Wetprocess » Cleaning » SPIN150i-200i In-Deck
Up to 6" (150mm)
PTFE
In-Deck Version