Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

Polishing | Wafer Edge Polish System | Edge Polish Tape

SPS-Europe offers Silicon Wafer Edge Polisher compatible with 6, 8, or 12 inch wafers, and uses Polishing Tape with a fixed-abrasive. The Edge Polish Tape can be fed through the machine during polishing, making it possible to constantly polish with a new abrasive surface and also give a consistent polishing capability. Our Edge Polishers shows high machining efficiency, also for beveling of 2-8 inch wafers of difficult-to-cut materials such as SiC and GaN